Author: Guilmain M. Labbaye T. Dellenbach F. Nauenheim C. Drouin D. Ecoffey S.
Publisher: IOP Publishing
ISSN: 0957-4484
Source: Nanotechnology, Vol.24, Iss.24, 2013-06, pp. : 245305-245312
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Reliability study of ultra-thin dielectric films with variable thickness levels
By Yuan Tao
IIE Transactions, Vol. 44, Iss. 9, 2012-09 ,pp. :