A damascene platform for controlled ultra-thin nanowire fabrication

Author: Guilmain M.   Labbaye T.   Dellenbach F.   Nauenheim C.   Drouin D.   Ecoffey S.  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.24, Iss.24, 2013-06, pp. : 245305-245312

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Abstract