A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring

Author： Šamara V.   Booth J-P   de Marneffe J-F   Milenin A.P.   Brouri M.   Boullart W.  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.21, Iss.6, 2012-12, pp. : 65004-65011

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