Acetylene–argon plasmas measured at an rf-biased substrate electrode for diamond-like carbon deposition: II. Ion energy distributions

By Baby A   Mahony C M O   Lemoine P   Maguire P D  

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15004-15019

IOP Publishing

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Collisional effect on the time evolution of ion energy distributions outside the sheath during the afterglow of pulsed inductively coupled plasmas

By Lee J B   Chang H Y   Seo S H  

Plasma Sources Science and Technology, Vol. 22, Iss. 6, 2013-12 ,pp. : 65008-65018

IOP Publishing

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A semi-analytic collisionless sheath model for multicomponent plasmas and ion energy and angular distributions at rf-biased electrodes

By Kwon Deuk-Chul   Song Mi-Young   Yoon Jung-Sik  

Journal of Physics D: Applied Physics, Vol. 46, Iss. 2, 2013-01 ,pp. : 25202-25208

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Ion energy distributions in laser-produced plasmas with two collinear pulses

By Apiñaniz Jon I   Gordillo-Vázquez Francisco J   Martínez Roberto  

Plasma Sources Science and Technology, Vol. 21, Iss. 1, 2012-02 ,pp. : 15016-15025

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Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode

By Corbella C   Rubio-Roy M   Bertran E   Portal S   Pascual E   Polo M C   Andújar J L  

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15006-15013

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