Simulation of formation of nanostructures during sputtering of the surface by ion bombardment

Author： Rudyi A.   Kulikov A.   Metlitskaya A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.40, Iss.2, 2011-03, pp. : 98-107

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