Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane

Author: Kosinova M.   Rumyantsev Yu.   Chernyavskii L.   Nikulina L.   Kesler V.   Maximovskii E.   Fainer N.   Rakhlin V.   Voronkov M.   Kuznetsov F.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1087-6596

Source: Glass Physics and Chemistry, Vol.36, Iss.4, 2010-08, pp. : 497-505

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