Systematic study of the influence of the Czochralski hot zone design on the point defect distribution with respect to a ''perfect'' crystal

Author: Krause M.   Friedrich J.   Muller G.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.4, 2002-08, pp. : 361-367

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