Effect of substrate temperature on the properties of deep ultraviolet transparent conductive ITO/Ga 2 O 3 films

Author： Ting Li Jinliang Yan Xingwei Ding Liying Zhang

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.33, Iss.1, 2012-01, pp. : 13002-13006

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