Low-temperature growth of RuO 2 films for conductive electrode applications

Author: Frohlich K.   Cambel V.   Machajdk D.   Baumann P.K.   Lindner J.   Schumacher M.   Juergensen H.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 173-177

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Abstract