Strength analysis of MEMS gyro elastic suspensions

Author: Evstifeev M.   Rozentsvein D.   Chelpanov I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 2075-1087

Source: Gyroscopy and Navigation, Vol.1, Iss.4, 2010-10, pp. : 263-271

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Abstract