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Period of time: 2003年2期
Publisher: Elsevier
Founded in: 1998
Total resources: 4
ISSN: 1369-8001
Subject: TN Radio Electronics, Telecommunications Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Materials Science in Semiconductor Processing,volume 5,issue 2
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Ferroelectric thin and thick films for microsystems
By Whatmore R.W., Zhang Q., Huang Z., Dorey R.A. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
By Pardo L., Poyato R., Gonzalez A., Calzada M.L. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
MOCVD for complex multicomponent thin films-a leading edge technology for next generation devices
By Schumacher M., Lindner J., Baumann P.K., Schienle F., Solayappan N., Joshi V., Araujo C.A., McMillan L.D. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
Fabrication and characterization of PZT-PMWSN thin film using pulsed laser deposition
By Kim C.S., Kim S.K., Lee S.Y. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
Chemical solution deposition of PZT thin films for microelectronics
By Kosec M., Malic B., Mandeljc M. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
Influence of growth parameters on properties of electroceramic thin films grown via MO-CVD
By Padeletti G., Viticoli M., Cusma A., Ingo G.M., Santoni A., Loreti S., Minarini C., Viticoli S. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications
By Kim S.K., Kim C.-S., Lee K.W., Lee S.Y. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
By Remiens D., Cattan E., Soyer C., Haccart T. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.![](/images/ico/ico5.png)
First-principles calculations of perovskite thin films
By Eglitis R.I., Heifets E., Kotomin E.A., Maier J., Borstel G. in (2002)
Materials Science in Semiconductor Processing,volume 5,issue 2 , Vol. 5, Iss. 2, 2002-04 , pp.