Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications

Author: Kim S.K.   Kim C.-S.   Lee K.W.   Lee S.Y.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 115-121

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