Journal of Micromechanics and Microengineering,volume 25,issue 6  (06-2015)

Period of time： 2015年6期

Publisher： IOP Publishing

Founded in： 1991

Total resources： 42

E-ISSN： 1361-6439|25|6

ISSN： 0960-1317

Subject：

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Journal of Micromechanics and Microengineering,volume 25,issue 6

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Microfeature edge quality enhancement in excimer laser micromachining of metal films by coating with a sacrificial polymer layer

By Sharma Shashank,Dayal Govind,Ramakrishna S Anantha,Ramkumar J,Sharma Shashank in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65001-65012

IOP Publishing

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Electric current characteristic of anodic bonding

By He Jun,Yang Fang,Wang Wei,Zhang Li,Huang Xian,Zhang Dacheng in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65002-65011

IOP Publishing

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A study of long term operation and reliability of heated atomic force microscope cantilevers

By King William P,King William P in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65003-65009

IOP Publishing

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Flow behavior of polymers during the roll-to-roll hot embossing process

By Deng Yujun,Yi Peiyun,Peng Linfa,Lai Xinmin,Lin Zhongqin in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65004-65014

IOP Publishing

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A 3D microfluidic device fabrication method using thermopress bonding with multiple layers of polystyrene film

By Cao Y,Bontrager-Singer J,Zhu L in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65005-65014

IOP Publishing

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Modulating surface stiffness of polydimethylsiloxane (PDMS) with kiloelectronvolt ion patterning

By Liu Boyin,Fu Jing in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65006-65014

IOP Publishing

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Laterally-actuated inside-driven RF MEMS switches fabricated by a SOG process

By Wang Li-Feng,Han Lei,Tang Jie-Ying,Huang Qing-An in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65007-65016

IOP Publishing

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Iso- and variothermal injection compression moulding of polymer micro- and nanostructures for optical and medical applications

By Rytka C,Kristiansen P M,Neyer A in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65008-65023

IOP Publishing

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Design and modeling of a light powered biomimicry micropump

By Liu Jin,Dutta Prashanta,Liu Jin in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65009-65021

IOP Publishing

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Cavity-enhanced sacrificial layer micromachining for faster release of thin film encapsulated MEMS

By Lee Jae-Wung,Sharma Jaibir,Merugu Srinivas,Singh Navab,Lee Jae-Wung,Lee Jae-Wung in (2015)

Journal of Micromechanics and Microengineering,volume 25,issue 6 , Vol. 25, Iss. 6, 2015-06 , pp. 65010-65017

IOP Publishing

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