Author: He Jun Yang Fang Wang Wei Zhang Li Huang Xian Zhang Dacheng
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|6|65002-65011
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.6, 2015-06, pp. : 65002-65011
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Abstract