Electric current characteristic of anodic bonding

Author: He Jun   Yang Fang   Wang Wei   Zhang Li   Huang Xian   Zhang Dacheng  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|6|65002-65011

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.6, 2015-06, pp. : 65002-65011

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Abstract