Single-use MEMS sealing valve with integrated actuation for ultra low-leak vacuum applications

By Dighe Aalap S   Livermore Carol  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 10, 2014-10 ,pp. : 105011-105021

IOP Publishing

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FULLY INTEGRATED PIEZOELECTRIC RF MEMS IN-LINE DC CONTACT SWITCHES WITH ULTRA-LOW VOLTAGE OPERATION

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Integrated Ferroelectrics, Vol. 76, Iss. 1, 2005-11 ,pp. : 69-79

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Review of MEMS metrology solutions

By Nichols James F.   Shilling Meghan   Kurfess Thomas R.  

International Journal of Manufacturing Technology and Management, Vol. 13, Iss. 2-3, 2008-01 ,pp. : 344-359

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Principle and applications of MEMS: a review

By Mahalik N.P.  

International Journal of Manufacturing Technology and Management, Vol. 13, Iss. 2-3, 2008-01 ,pp. : 324-343

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Review of polymer MEMS micromachining

By Kim Brian J   Meng Ellis  

Journal of Micromechanics and Microengineering, Vol. 26, Iss. 1, 2016-01 ,pp. : 13001-13021

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