Studying electro-physical material characteristics of vacuum-deposited layers of aluminium (tantalum) when using aluminium sheet as a carrier for MCM, interconnections, vias and resistive groups

Author： Philippov Ph.   Arnaudov R   Yordanov N   Ianev V   Gospodinova M  

Publisher： Emerald Group Publishing Ltd

ISSN： 1356-5362

Source： Microelectronics International, Vol.15, Iss.3, 1998-03, pp. : 31-35

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