Functional room temperature metal (Al or Pd)-ZrO 2 (smooth or porous surface)-Si MOS capacitor O 2 sensor

Author： Soo Mun Teng Cheon Kuan Yew Noor Ahmad Fauzi Mohd

ISSN： 1356-5362

Source： Microelectronics International, Vol.28, Iss.1, 2011-01, pp. : 50-57

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