Electron holography study for two-dimensional dopant profile measurement with specimens prepared by backside ion milling

Author: Yoo Jung Ho   Yang Jun-Mo   Ulugbek Shaislamov   Ahn Chi Won   Hwang Wook-Jung   Park Joong Keun   Park Chul Min   Hong Seung Bum   Kim Joong Jung   Shindo Daisuke  

Publisher: Oxford University Press

ISSN: 0022-0744

Source: Journal of Electron Microscopy, Vol.57, Iss.1, 2008-01, pp. : 13-18

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Abstract