Pressure Sensitivity of Emission Intensities and Plasma Voltage for a Planar Magnetron Glow Discharge

Author： McCaig Lori   Sesi Norman   Sacks Richard  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.44, Iss.7, 1990-08, pp. : 1176-1182

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