Current Sensitivity of Plasma Voltage and Emission Line Intensities in a Planar Magnetron Glow Discharge Device

Author: McCaig Lori   Sacks Richard  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.46, Iss.1, 1992-01, pp. : 18-24

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Abstract