Surface Features of Conductors Eroded by Sputtering in a Magnetron Glow Discharge Plasma

Author: Dehghan Khodayar   Shi Zhan   Woodrum Teresa Holbrook   Brewer Stephen   Sacks Richard  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.48, Iss.5, 1994-05, pp. : 553-560

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Abstract