Sampling, Excitation, and Ionization Characteristics of a Planar Magnetron Glow-Discharge Device

Author: McCaig Lori   Shi Zhan   Woodrum Teresa Holbrook   Brewer Stephen   Sacks Richard  

Publisher: Society for Applied Spectroscopy

ISSN: 0003-7028

Source: Applied Spectroscopy, Vol.46, Iss.12, 1992-12, pp. : 1762-1768

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Abstract