Sputtering Behavior of a Magnetron Glow Discharge Device

Author： Shi Zhan   Woodrum Teresa Holbrook   Dehghan Khodayar   Brewer Stephen   Sacks Richard  

Publisher： Society for Applied Spectroscopy

ISSN： 0003-7028

Source： Applied Spectroscopy, Vol.46, Iss.5, 1992-05, pp. : 749-757

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Surface Features of Conductors Eroded by Sputtering in a Magnetron Glow Discharge Plasma

By Dehghan Khodayar   Shi Zhan   Woodrum Teresa Holbrook   Brewer Stephen   Sacks Richard  

Applied Spectroscopy, Vol. 48, Iss. 5, 1994-05 ,pp. : 553-560

Society for Applied Spectroscopy

Access to resources Recommend Favorite

Sampling, Excitation, and Ionization Characteristics of a Planar Magnetron Glow-Discharge Device

By McCaig Lori   Shi Zhan   Woodrum Teresa Holbrook   Brewer Stephen   Sacks Richard  

Applied Spectroscopy, Vol. 46, Iss. 12, 1992-12 ,pp. : 1762-1768

Society for Applied Spectroscopy

Access to resources Recommend Favorite

Radiative and Electrical Properties of a Planar Magnetron Glow Discharge Device

By McCaig Lori   Sacks Richard   Lubman David  

Applied Spectroscopy, Vol. 43, Iss. 6, 1989-08 ,pp. : 912-917

Society for Applied Spectroscopy

Access to resources Recommend Favorite

Radiative and Electrical Properties of a Center-Post Cathode Magnetron Glow Discharge Device

By Tanguay Suzanne   Sacks Richard  

Applied Spectroscopy, Vol. 42, Iss. 4, 1988-05 ,pp. : 576-583

Society for Applied Spectroscopy

Access to resources Recommend Favorite

Current Sensitivity of Plasma Voltage and Emission Line Intensities in a Planar Magnetron Glow Discharge Device

By McCaig Lori   Sacks Richard  

Applied Spectroscopy, Vol. 46, Iss. 1, 1992-01 ,pp. : 18-24

Society for Applied Spectroscopy

Access to resources Recommend Favorite