Elastically Strained Porous Silicon Layers Formed on Single-Crystal Substrates

Author: Skupov V. D.   Smolin V. K.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.32, Iss.6, 2003-11, pp. : 382-384

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Abstract