Comparison between the Ion-Beam and the Laser Long-Range Gettering of GaAs MESFETs

Author: Obolenskii S. V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.33, Iss.2, 2004-03, pp. : 116-119

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