Pore Sealing on Si(001) and Si(111) in Homoepitaxy and Annealing: A Monte Carlo Simulation

Author: Zverev A. V.   Neizvestny I. G.   Chemakin A. V.   Shwartz N. L.   Yanovitskaya Z. Sh.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.33, Iss.3, 2004-05, pp. : 137-146

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Abstract