Nitrogen concentration in ZnO films grown by magnetron sputtering in an Ar-NO plasma

Author： Kononenko O.   Noh Y.   Kim T.   Choi W.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.36, Iss.1, 2007-02, pp. : 27-32

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