Transformation of a Gaussian doping profile in a temperature field as influenced by the temperature dependence of the diffusion coefficient

Author: Ovcharov V.   Rudakov V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.36, Iss.3, 2007-05, pp. : 171-178

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Abstract