Synthesis and investigation of new materials in MIS structures for the development of physical foundations of CMOS technologies of nanoelectronics

Author： Zenkevich A. Lebedinskii Yu. Matveev Yu. Barantsev N. Voronov Yu. Sogoyan A. Nevolin V. Chichkov V. Spiga S. Fanchulli M.

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7397

Source： Russian Microelectronics, Vol.39, Iss.3, 2010-06, pp. : 165-174

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