Precipitate recognition and recombination strength in annealed Czochralski silicon wafers

Author: Stemmer M.   Vève C.   Gay N.   Martinuzzi S.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.11, Iss.7, 1995-07, pp. : 703-706

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Abstract