Development of a combined piezoresistive pressure and temperature sensor using a chemical protective coating for Kraft pulp digester process monitoring

Author: Mohammadi Abdolreza R   Bennington Chad P J   Chiao Mu  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.1, 2011-01, pp. : 15009-15018

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