A process to control diaphragm thickness with a provision for back to front alignment in the fabrication of polysilicon piezoresistive pressure sensor

By Akhtar J.   Dixit B.B.   Pant B.D.   Deshwal V.P.   Joshi B.C.  

Sensor Review, Vol. 23, Iss. 4, 2003-09 ,pp. : 311-315

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Flexible Piezoresistive Pressure Sensor Using Wrinkled Carbon Nanotube Thin Films for Human Physiological Signals

By  

Advanced Materials Technologies, Vol. 3, Iss. 1, 2018-01 ,pp. : n/a-n/a

John Wiley & Sons Inc

Access to resources Recommend Favorite

Aluminosilicate coating prepared by low pressure chemical vapour deposition using TEOS and AlCl₃ as precursors

By Chen Z. F.  

Surface Engineering, Vol. 26, Iss. 8, 2010-11 ,pp. : 607-609

Maney Publishing

Access to resources Recommend Favorite

Polysilicon in situ phosphorus doping control over large concentration range using low temperature, low pressure chemical vapour deposition growth process

By Briand D.   Sarret M.   Le Bihan F.   Bonnaud O.   Pichon L.  

Materials Science and Technology, Vol. 11, Iss. 11, 1995-11 ,pp. : 1207-1209

Maney Publishing

Access to resources Recommend Favorite

Micro machining process of high temperature pressure sensor gauge chip based on SIMOX SOI wafer

By Wang Quan   Ding Jianning   Xue Wei   Ling Zhiyong  

International Journal of Materials and Product Technology, Vol. 31, Iss. 2-3, 2008-04 ,pp. : 375-385

Inderscience Publishers

Access to resources Recommend Favorite