Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids

By Pfusterschmied G   Kucera M   Wistrela E   Manzaneque T   Ruiz-Díez V   Sánchez-Rojas J L   Bittner A   Schmid U  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 10, 2015-10 ,pp. : 105014-105021

IOP Publishing

Access to resources Recommend Favorite

Piezoelectric polydimethylsiloxane films for MEMS transducers

By Wang Jhih-Jhe   Hsu Tsung-Hsing   Yeh Che-Nan   Tsai Jui-Wei   Su Yu-Chuan  

Journal of Micromechanics and Microengineering, Vol. 22, Iss. 1, 2012-01 ,pp. : 15013-15021

IOP Publishing

Access to resources Recommend Favorite

Dynamic nonlinear behavior of torsional resonators in MEMS

By Caspani A   Comi C   Corigliano A   Langfelder G   Zega V   Zerbini S  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 9, 2014-09 ,pp. : 95025-95033

IOP Publishing

Access to resources Recommend Favorite

ACTIVE DAMPING OF A PIEZOELECTRIC MEMS ACOUSTIC SENSOR

By WU XIAOMING   REN TIANLING   LIU LITIAN  

Integrated Ferroelectrics, Vol. 80, Iss. 1, 2006-11 ,pp. : 317-329

Taylor & Francis Ltd

Access to resources Recommend Favorite

MODELING AND SIMULATION OF PIEZOELECTRIC MEMS ENERGY HARVESTING DEVICE

By Lin J. H.   Wu X. M.   Ren T. L.   Liu L. T.  

Integrated Ferroelectrics, Vol. 95, Iss. 1, 2007-12 ,pp. : 128-141

Taylor & Francis Ltd

Access to resources Recommend Favorite