Piezoelectric polydimethylsiloxane films for MEMS transducers

Author： Wang Jhih-Jhe   Hsu Tsung-Hsing   Yeh Che-Nan   Tsai Jui-Wei   Su Yu-Chuan  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.22, Iss.1, 2012-01, pp. : 15013-15021

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