Surface activation-based nanobonding and interconnection at room temperature

Author: Howlader M M R   Yamauchi A   Suga T  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25009-25018

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Abstract