SU-8 Photolithography as a Toolbox for Carbon MEMS

By Martinez-Duarte Rodrigo  

Micromachines, Vol. 5, Iss. 3, 2014-09 ,pp. : 766-782

MDPI

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Low Temperature Deposited BST Thin Films for RF MEMS Switch

By Laishram Radhapiyari   Thakur O. P.   Bhattacharya D. K.   Goyal Anshu   Sharma Renu   Singh Jagbir   Pal Ramjay  

Integrated Ferroelectrics, Vol. 116, Iss. 1, 2010-01 ,pp. : 35-40

Taylor & Francis Ltd

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Design and characterization of a thermally actuated latching MEMS switch for telecommunication applications

By Dellaert D   Doutreloigne J  

Journal of Micromechanics and Microengineering, Vol. 24, Iss. 7, 2014-07 ,pp. : 75022-75030

IOP Publishing

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Innovative SU-8 Lithography Techniques and Their Applications

By Lee Jeong Bong   Choi Kyung-Hak   Yoo Koangki  

Micromachines, Vol. 6, Iss. 1, 2014-12 ,pp. : 1-18

MDPI

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SU-8 Composite Based “Lube-tape” for a Wide Range of Tribological Applications

By Saravanan Prabakaran   Satyanarayana Nalam   Sinha Sujeet K.  

Micromachines, Vol. 5, Iss. 2, 2014-05 ,pp. : 263-274

MDPI

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