Experimental analysis of the surface roughness evolution of etched glass for micro/nanofluidic devices

Author: Ren J   Ganapathysubramanian B   Sundararajan S  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25012-25018

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Abstract