Author: Lemke T Kloeker J Biancuzzi G Huesgen T Goldschmidtboeing F Woias P
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25011-25021
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Abstract
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