Fabrication of a normally-closed microvalve utilizing lithographically defined silicone micro O-rings

Author: Lemke T   Kloeker J   Biancuzzi G   Huesgen T   Goldschmidtboeing F   Woias P  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25011-25021

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