Design and characterization of the immersion-type capacitive ultrasonic sensors fabricated in a CMOS process

Author： Tang Po-Kai   Wang Po-Hsun   Li Meng-Lin   Lu Michael S-C  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25013-25020

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