Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers

Author： Suter M Ergeneman O Zürcher J Schmid S Camenzind A Nelson B J Hierold C

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 25023-25030

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