A batch-fabricated laser-micromachined PDMS actuator with stamped carbon grease electrodes

Author: Maleki T   Chitnis G   Ziaie B  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.21, Iss.2, 2011-02, pp. : 27002-27009

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Abstract