Numerical and experimental study on silicon microresonators based on phononic crystal slabs with reduced central-hole radii

Author： Wang Nan Hsiao Fu-Li Tsai J.M. Palaniapan Moorthi Kwong Dim-Lee Lee Chengkuo

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65030-65043

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