An electrostatic microvalve for pneumatic control of microfluidic systems

Author: Anjewierden Douglas   Liddiard Gregory A   Gale Bruce K  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25019-25027

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Abstract