Author: Anjewierden Douglas Liddiard Gregory A Gale Bruce K
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25019-25027
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Fabrication of Pneumatic Microvalve for Tall Microchannel Using Inclined Lithography
By Kaminaga Maho Ishida Tadashi Omata Toru
Micromachines, Vol. 7, Iss. 12, 2016-12 ,pp. :