A high-performance bulk mode single crystal silicon microresonator based on a cavity-SOI wafer

Author: Wu Guoqiang   Xu Dehui   Xiong Bin   Wang Yuelin  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.22, Iss.2, 2012-02, pp. : 25020-25027

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