Surface acoustic wave devices on AlN/3C–SiC/Si multilayer structures

Author: Lin Chih-Ming   Chen Yung-Yu   Felmetsger Valery V   Lien Wei-Cheng   Riekkinen Tommi   Senesky Debbie G   Pisano Albert P  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25019-25026

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