Fabrication techniques for multiscale 3D-MEMS with vertical metal micro- and nanowire integration

Author: Greiner F   Quednau S   Dassinger F   Sarwar R   Schlaak H F   Guttmann M   Meyer P  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.2, 2013-02, pp. : 25018-25029

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Abstract