Selected papers from the 23rd MicroMechanics and Microsystems Europe Workshop (MME 2012) (Ilmenau, Germany, September 9–12, 2012)

Author： Hoffmann Martin  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 70201-70201

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