Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

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Journal of Micromechanics and Microengineering, Vol. 23, Iss. 12, 2013-12 ,pp. : 125018-125024

IOP Publishing

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New Thermal Ink Jet Printhead with Improved Energy Efficiency Using Silicon Reactive Ion Etching

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Journal of Imaging Science and Technology, Vol. 43, Iss. 4, 1999-07 ,pp. : 332-338

Society for Imaging Science and Technology

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ETCH CHARACTERISTICS OF COFESIB MAGNETIC FILMS USING INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING FOR MAGNETIC RANDOM ACCESS MEMORY

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Integrated Ferroelectrics, Vol. 78, Iss. 1, 2006-11 ,pp. : 233-243

Taylor & Francis Ltd

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Surface Passivation of High Density InGaN/GaN Nanorods Fabricated by Reactive Ion Etching

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Oxide via hole formation using magnetically enhanced reactive ion etching

By Kim B.   Park J.  

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