Fabrication of 2D polymer nanochannels by sidewall lithography and hot embossing

Author： Cheng E Zou Helin Yin Zhifu Jurčíček Petr Zhang Xi

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 75022-75029

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