Stress reduction during phase change in Ge₂Sb₂Te₅ by capping TiN film

Author： Park Young Ryu Sang Choi Kyu Lee Seung Yoon Sung Yu Byoung

ISSN： 0957-4522

Source： Journal of Materials Science: Materials in Electronics, Vol.18, Iss.10, 2007-10, pp. : 1079-1082

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