Characterization of titanium thin films prepared by bias assisted magnetron sputtering

Author： Vijaya H.   Mohan Rao G.   Mohan S.   Muralidhar G.   Subbanna G.  

Publisher： Springer Publishing Company

ISSN： 1543-1916

Source： Metallurgical and Materials Transactions B, Vol.27, Iss.6, 1996-12, pp. : 1057-1060

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