The loss of boron in ultra-shallow boron implanted Si under heavy ion irradiation

Author: Pelicon P.   El Bouanani M.   Ravi Prasad G.   Razpet A.   Simčič J.   Guo B.   Birt D.   Duggan J.   Mcdaniel F.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.161, Iss.8, 2006-08, pp. : 487-494

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Abstract